ESR Series | |||||
Specifications | Unit | ESR20N | ESR80WN | ESR200WN | ESR300WN |
Pumping Speed 50/60 Hz 抽氣速度 |
CFM |
46 - 71
|
141 - 300
|
353 - 706
|
1059
|
L/min |
1300 - 2000
|
4,000 - 8,500
|
10,000 - 20,000
|
30,000
|
|
M3/Hr |
78 - 120
|
240 - 510
|
600 - 1,200
|
1,800
|
|
Ultimate Pressure 50/60 Hz 底壓 |
mTorr | 5 | 1.5 | 1 | 1.5 |
Pa | 0.67 | 0.2 | 0.13 | 0.2 | |
mBar | 0.0067 | 0.002 | 0.0013 | 0.002 | |
Connection 接口 |
Gas Inlet
|
NW 40
|
NW 50
|
ISO100
|
NW 100
|
Gas Outlet
|
NW 40
|
NW 40
|
NW 40
|
NW 40
|
|
Power at Ultimate Pressure 到達(dá)底壓時(shí)的功率 |
KW |
0.55 - 0.70
|
0.8 - 1.9
|
0.8 - 1.1
|
2.9
|
Maximum Power *大功率 |
KW | 2.5 | 4.5 | 5 | 7.5 |
Cooling Water Requirements 冷卻水要求 |
Min. Flow Rate | 2 | 2 | 2 | 3.5 |
L/min | |||||
Bearing and Dilution N2 隔離和稀釋N2 |
Bearing Seals |
0 to 12
|
2 to 12
|
2 to 12
|
2 to 12
|
L/min | |||||
Cabinet Dimensions | inches |
25 x 11 x 12.6
|
26 x 15 x 25.8
|
31.1 x 15 x 25.8
|
33 x 19 x 35
|
LxWxH 外型尺寸 |
mm |
635 x 280 x 320
|
660 x 380 x 655
|
790 x 380 x 644
|
(825 x 460 x 880)
|
Weight 重量 |
lbs | 200 | 400 | 520 | 860 |
kg | 90 | 180 | 250 | 390 |